发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor and a manufacturing method of the same, which can inhibit a characteristic change of a metal oxide for forming a semiconductor layer, which is caused by light irradiation from a liquid crystal display, an organic EL display or the like by providing a channel cover for blocking irradiation of light of a visible light spectrum on a channel. ! SOLUTION: A thin film transistor 10 comprises: a gate electrode 30; an insulator layer 40 provided to cover a top face of the gate electrode 30; a semiconductor layer 50 provided on a top face of the insulator layer 40; a channel cover layer 90 provided on a top face of the semiconductor layer 50; and a source electrode 60 and a drain electrode 70 which are provided in contact with the semiconductor layer 50. The gate electrode 30 is provided to correspond to a channel in the semiconductor layer 50 between the source electrode 60 and the drain electrode 70. The channel cover layer 90 blocks irradiation of light of
申请公布号 JP2015144175(A) 申请公布日期 2015.08.06
申请号 JP20140016634 申请日期 2014.01.31
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 AIKAWA SHINYA ; TSUKAGOSHI KAZUHITO ; KIZU TAKIO ; SHIMIZU MAKI ; MITOMA NOBUHIKO ; NAMATAME TOSHIHIDE
分类号 H01L21/336;G02F1/1368;H01L29/786 主分类号 H01L21/336
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