发明名称 |
THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a thin film transistor and a manufacturing method of the same, which can inhibit a characteristic change of a metal oxide for forming a semiconductor layer, which is caused by light irradiation from a liquid crystal display, an organic EL display or the like by providing a channel cover for blocking irradiation of light of a visible light spectrum on a channel. ! SOLUTION: A thin film transistor 10 comprises: a gate electrode 30; an insulator layer 40 provided to cover a top face of the gate electrode 30; a semiconductor layer 50 provided on a top face of the insulator layer 40; a channel cover layer 90 provided on a top face of the semiconductor layer 50; and a source electrode 60 and a drain electrode 70 which are provided in contact with the semiconductor layer 50. The gate electrode 30 is provided to correspond to a channel in the semiconductor layer 50 between the source electrode 60 and the drain electrode 70. The channel cover layer 90 blocks irradiation of light of |
申请公布号 |
JP2015144175(A) |
申请公布日期 |
2015.08.06 |
申请号 |
JP20140016634 |
申请日期 |
2014.01.31 |
申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
AIKAWA SHINYA ; TSUKAGOSHI KAZUHITO ; KIZU TAKIO ; SHIMIZU MAKI ; MITOMA NOBUHIKO ; NAMATAME TOSHIHIDE |
分类号 |
H01L21/336;G02F1/1368;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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