发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 A semiconductor memory device according to an embodiment includes a memory cell array and a control circuit. The memory cell array includes: a plurality of first conductive layers that are stacked; a memory layer provided on a side surface of the plurality of the first conductive layers; and a second conductive layer that contacts the side surface of the plurality of the first conductive layers via the memory layer. A thickness of the first conductive layer disposed at the first position is larger than a thickness of the first conductive layer disposed at the second position. The control circuit is configured to apply a first voltage to a selected first conductive layer. The control circuit changes a value of the first voltage based on a position of the selected first conductive layer.
申请公布号 US2015221368(A1) 申请公布日期 2015.08.06
申请号 US201414305371 申请日期 2014.06.16
申请人 Kabushiki Kaisha Toshiba 发明人 KANNO Hiroshi;TSUKAMOTO Takayuki;OKAWA Takamasa;YOSHIDA Atsushi
分类号 G11C13/00;H01L45/00 主分类号 G11C13/00
代理机构 代理人
主权项 1. A semiconductor memory device, comprising a memory cell array and a control circuit, the memory cell array including: a plurality of first conductive layers that are stacked in a first direction perpendicular to a substrate and extend in a second direction parallel to the substrate; a memory layer provided on a side surface of the plurality of the first conductive layers; and a second conductive layer that extends in the first direction and includes a first side surface that contacts the side surface of the plurality of the first conductive layers via the memory layer, a width in the second direction of the first side surface of the second conductive layer at a first position in the first direction being smaller than a width in the second direction of the first side surface of the second conductive layer at a second position lower than the first position, a thickness in the first direction of the first conductive layer disposed at the first position being larger than a thickness in the first direction of the first conductive layer disposed at the second position, the control circuit being configured to apply a first voltage to a selected first conductive layer of the first conductive layers and provide a second voltage to the second conductive layer, and the control circuit being configured capable of, when the control circuit applies the first voltage to the selected first conductive layer, changing a value of the first voltage based on a position in the first direction of the selected first conductive layer.
地址 Minato-ku JP