| 摘要 |
A purge device (1) has an internal space (1A) demarcated by a housing (3) and performs a process for purging the inside of a storage container (F) storing an object to be stored and disposed in the internal space with a purge gas. The purge device (1) is equipped with a blowing unit (59) disposed outside the housing and blowing air into a region where gas containing the purge gas in the internal space leaks out from an opening portion (30) of the housing, thereby diffusing the gas containing the purge gas leaking out from the opening portion. |
