发明名称 |
BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS |
摘要 |
The invention relates to a beam propagation camera and a method for light beam analysis. A beam propagation camera according to the invention comprises at least one beam-splitting optical arrangement (240) which splits a beam impinging on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera during operation into a plurality of partial beams, and a sensor arrangement (250) for detecting said partial beams, wherein the beam-splitting optical arrangement (240) has a diffractive structure (241), and wherein said diffractive structure (241) is designed in such a way that at least two of the partial beams on the sensor arrangement (250) are spatially separated from one another and have a focus offset in a longitudinal direction relative to the optical axis (OA). |
申请公布号 |
WO2015113713(A1) |
申请公布日期 |
2015.08.06 |
申请号 |
WO2014EP78943 |
申请日期 |
2014.12.22 |
申请人 |
CARL ZEISS SMT GMBH;MANGER, MATTHIAS |
发明人 |
MANGER, MATTHIAS |
分类号 |
G01J1/42;B23K26/30;G01J1/04;G02B27/10 |
主分类号 |
G01J1/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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