发明名称 BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS
摘要 The invention relates to a beam propagation camera and a method for light beam analysis. A beam propagation camera according to the invention comprises at least one beam-splitting optical arrangement (240) which splits a beam impinging on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera during operation into a plurality of partial beams, and a sensor arrangement (250) for detecting said partial beams, wherein the beam-splitting optical arrangement (240) has a diffractive structure (241), and wherein said diffractive structure (241) is designed in such a way that at least two of the partial beams on the sensor arrangement (250) are spatially separated from one another and have a focus offset in a longitudinal direction relative to the optical axis (OA).
申请公布号 WO2015113713(A1) 申请公布日期 2015.08.06
申请号 WO2014EP78943 申请日期 2014.12.22
申请人 CARL ZEISS SMT GMBH;MANGER, MATTHIAS 发明人 MANGER, MATTHIAS
分类号 G01J1/42;B23K26/30;G01J1/04;G02B27/10 主分类号 G01J1/42
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