SCRIBING APPARATUS OF BRITTLE MATERIAL SUBSTRATE

摘要

The present invention provides a scribing apparatus capable of precisely scribing using an upper and a lower cutter wheels by preventing sagging or bending of a mother board. The scribing apparatus comprises: a front conveyor (1a) and a rear conveyor (1b) arranged in series with a predetermined gap (P) therebetween on a same plane, and placing and conveying a brittle material substrate (M) to be processed; an upper cutter wheel (2a) and a lower cutter wheel (2b) arranged on the gap (P) between the front conveyor (1a) and the rear conveyor (1b); and an upper air spray member (8a) and a lower air spray member (8b) arranged on a side part of each of the upper cutter wheel (2a) and the lower cutter wheel (2b) in the gap (P) to spray air to both the upper and the lower surface of the brittle material substrate (M).