WAVEGUIDE-COUPLED VERTICAL CAVITY LASER

摘要

An integrated circuit includes an optical source that provides an optical signal to an optical waveguide. In particular, the optical source may be implemented by fusion-bonding a III-V semiconductor to a semiconductor layer in the integrated circuit. In conjunction with surrounding mirrors (at least one of which is other than a distributed Bragg reflector), this structure may provide a cavity with suitable optical gain at a wavelength in the optical signal along a vertical direction that is perpendicular to a plane of the semiconductor layer. For example, the optical source may include a vertical-cavity surface-emitting laser (VCSEL). Moreover, the optical waveguide, defined in the semiconductor layer, may be separated from the optical source by a horizontal gap in the plane of the semiconductor layer. During operation of the optical source, the optical signal may be optically coupled across the gap from the optical source to the optical waveguide.

主权项

1. An integrated circuit, comprising:
an optical source configured to provide an optical signal having a wavelength, wherein the optical source includes:
a semiconductor layer including a region having a top surface and a bottom surface;a material having a top surface and a bottom surface, wherein the bottom surface of the material is disposed on the top surface of the region, and wherein the material has an optical gain at the wavelength that is larger than that of the semiconductor layer;a first mirror disposed under the bottom surface of the region, wherein the first mirror is other than a reflector that includes multiple layers with alternating indices of refraction; anda second mirror disposed on the top surface of the material, wherein the first mirror, the second mirror, the region and the material define an optical cavity out of a plane of the semiconductor layer; and an optical waveguide defined in the semiconductor layer.