SUBSTRATE CASE CLEANING APPARATUS

摘要

Parts of a substrate case can be separated and cleaned inside a tank body while making the cleaning solution evenly reach it. A substrate case C which is provided with a base Mb and shell Ms and holds a substrate inside is cleaned in a state with no substrate. Provision is made of a cleaning tank 40 which holds and cleans the parts of the base Mb and shell Ms of the substrate case C in a separated stated, provision is made of a conveyance mechanism which conveys the parts of the substrate case with the cleaning tank 40, and the cleaning tank 40 is provided with a tank body 42 and a lid 43 which can be opened and closed and is provided with a rotating plate 44 which is provided at a bottom part of the tank body 42 to be able to rotate about an axis in the vertical direction, a plurality of base support rods 46 which are provided standing up at the rotating plate 44 and which support parts of the outer edge of the base Mb at a predetermined height position, and a plurality of shell support rods 47 which are provided standing up at the rotating plate 44 and which support parts of the outer edge of the shall Ms at a predetermined height position different from the base support rods 46.

主权项

1. A substrate case cleaning apparatus which cleans, in a state with no substrate, a substrate case which is provided with a base and a shell which covers said base and holds a substrate inside it,
said substrate case cleaning apparatus comprising: a booth which forms a clean space, a cleaning tank which is provided inside said booth and holds and cleans parts of the base and shell of the substrate case in a separated state, and a conveyance mechanism which conveys the parts of the substrate case to the cleaning tank, wherein said cleaning tank comprises a tank body which has an opening which opens upward and a lid which can operate to be opened when conveying parts of the substrate case through the opening of said tank body and to be closed when cleaning the parts, and further comprises a rotating plate which is provided at a bottom part of said tank body of said cleaning tank to be able to rotate about an axis in the vertical direction, a rotation drive part which drives rotation of said rotating plate, a plurality of base support rods which are provided standing up at said rotating plate and which support parts of the outer edge of the base at a predetermined height position, and a plurality of shell support rods which are provided standing up at said rotating plate and which support parts of the outer edge of the shell at a predetermined height position different from said base support rods.