主权项 |
1. A method of actuating a plurality of probes, the method comprising delivering energy to the probes so that the probes deform relative to a sample, wherein the energy is delivered to the probes by sequentially illuminating them with an actuation beam in a series of scan sequences, wherein two or more of the probes are illuminated by the actuation beam in each scan sequence; and controlling the actuation beam so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences. |