DUAL ARM ROBOT

摘要

A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

主权项

1. A robot assembly comprising:
a vertical motion assembly comprising:
a column supported on a base;a pair of vertically extending rails disposed on the column;a rotatable driving member mounted to the column for rotation about a vertical axis parallel to the vertically extending rails;a carriage mounted for reciprocating travel along the pair of vertically extending rails, the carriage comprising a stage configured to support a motor stack thereon, and a prismatic joint engageable with the column, the stage including a transmission mechanism engageable with the rotatable driving member to transfer rotary motion of the rotatable driving member to linear motion of the carriage;at least one robot arm having an end effector mounting flange at a distal end; anda motor stack disposed on the stage of the carriage, the motor stack being in operative communication with the robot arm to provide translation and rotation of the end effector mounting flange.