LASER MACHINING DEVICE FOR USE IN PATTERNING

摘要

A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.

主权项

1. A laser machining device for use in patterning, which is configured to form a machining line in a thin-film layer formed on a workpiece by using a laser beam, the laser machining device comprising:
a constant-speed feeder configured to feed the workpiece in a single feeding direction at a predetermined feeding speed; a beam head unit including a plurality of beam heads,
each beam head being configured to scan a single laser beam on the thin-film layer of the workpiece from an irradiation start side toward an irradiation end side in a direction crossing the feeding direction of the workpiece while either the workpiece is being fed by the constant-speed feeder at the predetermined feeding speed or the workpiece is being fed by the constant-speed feeder and the feeding speed of the workpiece is being detected; a laser oscillator configured to emit the laser beam to irradiate each beam head with the laser beam; and a controller configured to control a scanning speed of the laser beam emitted from each beam head and the feeding speed of the workpiece in relation to each other to control the machining line formed in the workpiece fed at the predetermined feeding speed, wherein the controller is configured to switch a beam head or beam heads to use to form the machining line or machining lines among the plurality of beam heads to form the machining line alternately or the machining lines concurrently.