SUBSTRATE TRANSFER SYSTEM AND METHOD

摘要

This end effector (5) is provided with a first hand (8) and a second hand (9) which can be driven independently of each other. The first hand (8) has a hand body (10) which is insertable between vertically adjoined substrates housed in a substrate housing part, and holds a substrate (S) immediately over or under the hand body (10). The second hand (9) has a hand base part (11) at least a part of which advances under a lowermost substrate (S) or over an uppermost substrate (S) among a plurality of substrates (S) housed in the substrate housing part, and a substrate holding means (12) which is provided on the hand base part (11) to hold two or more substrates (S) including the lowermost or uppermost substrate (S). This end effector (5) makes it possible to transfer substrates without a hitch even if there is a restriction on using a batch transfer hand due to circumstances on the substrate housing part side.