MICRO-PUMP AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention provides a micro pump including a micro pump chamber unit including a body with an inlet wherein a fluid flows, an outlet through which the fluid flows out, and a fluid passage wherein the fluid flows between the inlet and outlet and a lower electrode arranged on a part corresponding to the lower part of the flow passage of the body; and a membrane unit including a thin membrane attached on the surface of the body of the micro pump chamber unit wherein the fluid passage is formed and including multiple upper electrodes arranged on the part corresponding to the lower electrode. The present invention provides the micro pump capable of being operated at a low voltage and at a high frequency and capable of being efficiently operated by analyzing a flow rate based on input signals and a manufacturing method of the micro pump.