| 摘要 |
<p>An apparatus for inspecting a thermal assist type magnetic head is constituted by a scanning probe microscope means including a cantilever having a probe with a magnetic film formed on the surface of a tip portion thereof; a probe unit which provides an alternating current to a terminal formed on the thermal assist type magnetic head element and causes a pulse drive current or pulse drive voltage; a scattered light detection means which scans the near-field light emitting part with the probe to detect the scattered light generated from the probe in the generation region of the near-field light; an imaging means which image the thermal assist type magnetic head element; and a signal process means inspects the thermal assist type magnetic head element and an output signal outputted from the scanning probe microscope means by scanning with the probe while providing an alternating current to the terminal.</p> |
