APPARATUS FOR EXTREME ULTRA-VIOLET BEAM GENERATION USING MULTI-GAS CELL MODULE

摘要

The present invention relates to an apparatus for generating an extreme ultra-violet beam using a multi-gas cell module. A sub gas cell functioning as a buffer chamber is put beside a main gas cell to prevent the direct outflow of gas from a vacuum chamber and lower the diffusion velocity of the gas. Thus, a high vacuum state can be maintained and an extreme ultra-violet (EUV) with high power can be generated consecutively.