| 摘要 |
The present invention relates to pellicles comprising a frame, a membrane, and a holder. The frame fixates a reticle and possesses a gradient-type locking groove. The membrane is opposed to the reticle, and the holder fixates the membrane and possesses a locking part which is detachable to the gradient-type locking groove. Therefore, the patterns on the reticle can be protected from damages since the reticle fixed to the frame does not require a process of washing. |
