发明名称 金属酸化物被膜の膜厚測定装置および膜厚検査装置
摘要 <p>PROBLEM TO BE SOLVED: To provide a device capable of measuring the film thickness of a metal oxide coat formed on the surface of a glass container in a non-contact manner and correctly measuring the film thickness of the coat without being affected by the body diameter tolerance or decentering of the glass container.SOLUTION: A film thickness measurement device includes: a light quantity measuring sensor 4 that includes a head part 41 having a phototransmitter 42 for radiating light toward a glass bottle G and a photoreceiver 43 for receiving light reflected on a metal oxide coat of the glass container G and a measuring circuit part 40 for obtaining measurement data according to the amount of the reflection light received by the photoreceiver 43; a distance measuring sensor that measures a distance between the head part 41 of the light quantity measuring sensor 4 and the glass bottle G; and an arithmetic sequence unit 6 that takes in the measurement data from the measuring circuit part 40 of the light quantity measuring sensor 4 and performs a computation for converting the amount of the reflection light received into the film thickness of the coat to obtain film thickness calculation data. The arithmetic sequence unit 6 performs the computation using such an arithmetic expression that the film thickness calculation data has a value corrected in accordance with the measurement value of the distance obtained by the distance measuring sensor.</p>
申请公布号 JP5759440(B2) 申请公布日期 2015.08.05
申请号 JP20120279170 申请日期 2012.12.21
申请人 发明人
分类号 G01B11/06 主分类号 G01B11/06
代理机构 代理人
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