DOUBLE-SIDED ADHESIVE SHEET FOR POLISHING PAD

摘要

The present invention provides a double-sided adhesive sheet for a polishing pad, in which an upper adhesive layer for adhering a polishing pad is formed on one surface of a base film, and a lower adhesive layer for adhering a platen is formed on the other surface of the base film. The upper adhesive layer is made up of acrylic-based adhesive, and the lower adhesive layer is made up of acrylonitrile-butadiene rubber-based adhesive. The double-sided adhesive sheet is sanded when attaching the polishing pad to the platen, thereby having excellent adhesiveness to the platen which has large surface roughness and, at the same time, not leaving residue during desquamation after the process.