PROBE FOR HIGH SPEED SCANNING

摘要

A measurement probe ( 5 ) which comprises a housing ( 16 ) for mounting on an arm ( 6 ) of a coordinate positioning apparatus ( 2 ) and a stylus ( 10 ) mounted on a stylus support member ( 28 ). The stylus ( 10 ) and the stylus support member ( 28 ) are deflectable with respect to the housing ( 16 ). A first transducer system ( 40-48 ) measures movement of the stylus support member ( 28 ) relative to the arm ( 6 ) of the coordinate positioning apparatus ( 2 ). A second transducer system ( 38 ) measures movement of the stylus tip ( 12 ) relative to the stylus supporting member ( 28 ). A measurement of total stylus deflection is achieved by combining data from the first and second transducer systems.