发明名称 THE SOLDER BUMP STRUCTURE AND METHOD OF FABRICATING THE SAME
摘要 The present invention relates to a method for fabricating a solder bump and a solder bump structure thereof. The method comprises the steps of: preparing a device formed with a conductive pad; forming an insulating layer on at least parts of the upper conductive pad and the device; forming insulating layer patterns comprising cavities which expose the conductive pad by etching the insulating layer; forming a solder layer on a front surface of the conductive pad and insulating layer patterns; forming a solder bump in the solder layer, wherein the solder bump directly touches the conductive pad surrounded by the insulating layer patterns, by a dewetting treatment using plasma; and removing the insulating layer patterns.
申请公布号 KR101542161(B1) 申请公布日期 2015.08.05
申请号 KR20140026768 申请日期 2014.03.06
申请人 SNU R&DB FOUNDATION 发明人 LEE, JUNG JOONG;CHOE HAN JOO;KWON, SOON HO
分类号 H01L23/48;H01L21/60;H01L23/12 主分类号 H01L23/48
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