发明名称 |
THE SOLDER BUMP STRUCTURE AND METHOD OF FABRICATING THE SAME |
摘要 |
The present invention relates to a method for fabricating a solder bump and a solder bump structure thereof. The method comprises the steps of: preparing a device formed with a conductive pad; forming an insulating layer on at least parts of the upper conductive pad and the device; forming insulating layer patterns comprising cavities which expose the conductive pad by etching the insulating layer; forming a solder layer on a front surface of the conductive pad and insulating layer patterns; forming a solder bump in the solder layer, wherein the solder bump directly touches the conductive pad surrounded by the insulating layer patterns, by a dewetting treatment using plasma; and removing the insulating layer patterns. |
申请公布号 |
KR101542161(B1) |
申请公布日期 |
2015.08.05 |
申请号 |
KR20140026768 |
申请日期 |
2014.03.06 |
申请人 |
SNU R&DB FOUNDATION |
发明人 |
LEE, JUNG JOONG;CHOE HAN JOO;KWON, SOON HO |
分类号 |
H01L23/48;H01L21/60;H01L23/12 |
主分类号 |
H01L23/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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