发明名称 STRETCHING APPARATUS FOR SUBSTRATE
摘要 <p>The present invention relates to a clamping apparatus for a substrate. The present invention may comprise: a first support plate having a support end which supports both ends of a substrate; a second support plate lifted in an upper portion of the first support plate, wherein a pressurization roller pressurizing both ends of the substrate in an upper portion is rotationally installed; and a magnetic force unit respectively provided on the first and the second support plate to clamp the substrate by a mutual magnetic force.</p>
申请公布号 KR20150089174(A) 申请公布日期 2015.08.05
申请号 KR20140009459 申请日期 2014.01.27
申请人 SUNIC SYSTEM. LTD. 发明人 PARK, JOO CHUL
分类号 H01L21/687 主分类号 H01L21/687
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