METHOD OF MANUFACTURING ELECTROSTATIC CHUCK

摘要

The present invention relates to an electrostatic chuck and a method for manufacturing the same, which can reduce high-temperature treatment during a manufacturing process. According to an embodiment of the present invention, an electrostatic chuck, which is provided within a substrate processing apparatus for a substrate to be mounted, comprises: an upper dielectric wherein an electrode is printed on a lower surface; a lower dielectric layer which is made of a dielectric material hardened at 400 deg. C or lower, wherein the upper surface thereof is bonded to a lower surface of the upper dielectric; and a base body wherein the upper surface thereof is bonded to a lower surface of the lower dielectric layer by a bonding layer as a medium.