发明名称 RESIN COMPOSITION, CURED FILM, LAMINATED FILM, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 [Problem] To provide a highly heat resistant resin composition which exhibits good tackiness at low temperatures less than or equal to 180°C, and whose production of a volatile portion due to decomposition or the like is small even at high temperatures greater than or equal to 250°C, and whose increase in adhesive force is small even after passage through a heat treatment step, and therefore which allows a base material to be easily peeled off at room temperature when the base material is to be peeled off, and a cured membrane and a laminate film that employ this resin composition. [Solution Means] A resin composition containing a polyimide-based resin and a methylol-based compound, the resin composition being characterized in that the polyimide-based resin has an acid dianhydride residue and a diamine residue, and has as the diamine residue at least a residue of a polysiloxane-based diamine represented by General formula (1) and a residue of an aromatic diamine having a hydroxyl group, and a cured product and a laminate film that employ this resin composition. (n is a natural number, and an average value thereof calculated from an average molecular weight of the polysiloxane-based diamine is in a range of 5 to 30. R 1 and R 2 may be individually the same or different, indicating an alkylene group or a phenylene group whose carbon number is 1 to 30. R 3 to R 6 may be individually the same or different, indicating an alkyl group, a phenyl group or a phenoxy group whose carbon number is 1 to 30.)
申请公布号 EP2902447(A1) 申请公布日期 2015.08.05
申请号 EP20130841635 申请日期 2013.09.25
申请人 TORAY INDUSTRIES, INC. 发明人 WATANABE, TAKUO;LEE, CHUNGSEON
分类号 C08L79/08;B32B27/28;B32B27/34;C08G73/10;C08G77/455;C08K5/05;C09J7/02;C09J11/06;C09J179/08;C09J183/10;H01L21/301;H01L21/304 主分类号 C08L79/08
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