发明名称 Turbomolecular pump
摘要 The pump has a rotor, a pre-vacuum side stator disk, an average stator disk and a high-vacuum side stator disk provided with dividing plates (50, 52) and blades extending between inner radius (202) and outer radius (204). Blocking units (60, 62) are partially arranged between the inner radius and the outer radius. The disks are connected by spacer rings with respect to a shaft and arranged alternately with rotor disks and axially spaced from each other. The stator disks exhibit blade and disk assemblies.
申请公布号 EP2549115(A3) 申请公布日期 2015.08.05
申请号 EP20120174596 申请日期 2012.07.02
申请人 PFEIFFER VACUUM GMBH 发明人 SCHWEIGHÖFER, MICHAEL;STOLL, TOBIAS
分类号 F04D19/04;F04D29/54;F04D29/64 主分类号 F04D19/04
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