DEVICE FOR PRODUCING RADIATION DETECTION PANEL AND METHOD FOR PRODUCING RADIATION DETECTION PANEL

摘要

In a method of manufacturing a radiation detection panel, a photoelectric conversion substrate (21) is positioned vertically above an evaporation source such that the deposition surface of the photoelectric conversion substrate is exposed to the evaporation source and inclined with respect to a vertical axis. A scintillator material is evaporated and emitted vertically upward by the evaporation source to deposit a fluorescent film on the deposition surface.