METHOD FOR PRODUCING SAMPLES FOR TRANSMISSION ELECTRON MICROSCOPY USING TRIPOD POLISHING AND FOCUSED ION BEAM

摘要

The present invention relates to a method for producing samples for a transmission electron microscopy. According to the present invention, the method for producing samples includes: a step of polishing a bulk sample into a wedge shape; a step of finely etching the front and rear sides of at least one area on the polished sample using a focused ion beam; and a step of washing the finely etched sample. According to the present invention, the method for producing samples shortens time for producing samples and allows the stable production of samples for a transmission electron microscopy.