Laser beam amplifier and laser apparatus using the same

摘要

A laser beam amplifier with high optical axis stability is provided. The laser beam amplifier includes: a container for accommodating a laser medium; a pair of electrodes for performing discharge in the laser medium to form an amplification region for a laser beam in the laser medium; and an optical system for forming an optical path between a first point, upon which the laser beam is incident, and a second point, from which the laser beam is outputted, such that the amplification region is located in the optical path between the first point and the second point, wherein the first point and the second point are conjugate to each other, and the laser beam incident upon the first point is amplified while passing through the amplification region at least twice and then transferred to the second point.

主权项

1. A laser apparatus comprising:
a master oscillator configured to generate a pulse laser beam; a preamplifier including a first container configured to accommodate a laser medium, a first optical system including a first concave mirror configured to transfer an image of the pulse laser beam at a first point to form a first transfer image at a second point, and a pair of first electrodes arranged in the first container and configured to perform discharge in the laser medium to form an amplification region between the first point and the second point; relay optics configured to transfer the first transfer image at the second point to form a second transfer image at a third point; and a main amplifier including a second container configured to accommodate a laser medium, a second optical system including a second concave mirror configured to transfer the second transfer image at the third point to form a third transfer image at a fourth point, and a pair of second electrodes arranged in the second container and configured to perform discharge in the laser medium to form an amplification region between the third point and the fourth point.