发明名称 Semiconductor device with distinct multiple-patterned conductive tracks on a same level
摘要 A multiple-patterned semiconductor device and a method of manufacture are provided. The semiconductor device includes a conductive layer. The conductive layer includes conductive tracks which may be defined by photomasks. The conductive tracks may have quality characteristics. Distinct quality characteristics of distinct conductive tracks may be compared. Based on the comparison, signals and supply voltage may be routed on particular conductive tracks.
申请公布号 US9099533(B2) 申请公布日期 2015.08.04
申请号 US201313933488 申请日期 2013.07.02
申请人 International Business Machines Corporation 发明人 Allen David H.;Dewanz Douglas M.;Paulsen David P.;Sheets, II John E.
分类号 H01L23/48;H01L21/768;H01L21/66;H01L23/528 主分类号 H01L23/48
代理机构 Wood, Herron & Evans LLP 代理人 Wood, Herron & Evans LLP ;Williams Robert R.
主权项 1. A semiconductor device, comprising: a first conductive layer having: a first conductive track set defined by a first mask and a second conductive track set defined by a second mask, the first and second conductive track sets aligned so that first substantially parallel tracks of the first conductive track set alternate and are substantially parallel with second substantially parallel tracks of the second conductive track set,the first conductive track set having a first distinct quality characteristic and the second conductive track set having a second distinct quality characteristic, the first quality characteristic exceeding the second quality characteristic, andthe first substantially parallel tracks of the first conductive track set configured to receive data signals and the second substantially parallel tracks of the second conductive track set configured to receive a first and second supply voltage.
地址 Armonk NY US