Substrate treatment apparatus, and substrate treatment method

摘要

The substrate treatment apparatus according to the present invention includes a substrate holding mechanism which holds a substrate, a nozzle body having a spout which spouts an etching liquid toward a major surface of the substrate held by the substrate holding mechanism, a nozzle body movement mechanism which moves the nozzle body in a predetermined movement direction so as to move an etching liquid application position at which the etching liquid is applied on the major surface, a first flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on one of opposite sides of the etching liquid application position with respect to the movement direction, and a second flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on the other side of the etching liquid application position with respect to the movement direction.

主权项

1. A substrate treatment apparatus comprising:
a substrate holding mechanism which holds a substrate; a nozzle body having a spout which spouts an etching liquid toward a major surface of the substrate held by the substrate holding mechanism; a nozzle body movement mechanism which moves the nozzle body in a predetermined movement direction so as to move an etching liquid application position at which the etching liquid spouted by the nozzle body reaches the major surface; a first single unitary flexible sheet made of a flexible material and attached to the nozzle body, said first flexible sheet being disposed to be brought into contact with a portion of the major surface of the substrate located on one of opposite sides of said nozzle body with respect to the movement direction, the first flexible sheet being extended from the nozzle body so as to be bowed convexly forward with respect to the movement direction with a distal edge thereof being in contact with the major surface; and a second single unitary flexible sheet made of said flexible material and attached to the nozzle body, said second flexible sheet being disposed to be brought into contact with a portion of the major surface of the substrate located on the other of said opposite sides of said nozzle body with respect to the movement direction, the second flexible sheet being extended from the nozzle body so as to be bowed convexly forward with respect to the movement direction with a distal edge thereof being in contact with the major surface.