| 发明名称 | Deposition valve assembly and method of heating the same | ||
| 摘要 | A valve assembly including a mounting block having a first surface, a plurality of valves connected to the mounting block first surface, at least one fluid line connecting the plurality of valves spaced apart from the mounting block first surface, a heating element spaced apart from the at least one fluid line and located within a first insulating layer, and wherein the first insulating layer extends less than completely around the at least one fluid line. | ||
| 申请公布号 | US9096931(B2) | 申请公布日期 | 2015.08.04 |
| 申请号 | US201113312591 | 申请日期 | 2011.12.06 |
| 申请人 | ASM America, Inc | 发明人 | Yednak, III Andrew M.;Dunn Todd;White Carl;Manasco Michael |
| 分类号 | F16K49/00;C23C16/455;F16K27/00 | 主分类号 | F16K49/00 |
| 代理机构 | Snell & Wilmer LLP | 代理人 | Snell & Wilmer LLP |
| 主权项 | 1. A valve assembly comprising: a mounting block having a first surface; a plurality of valves connected to the mounting block first surface; a plurality of fluid lines, wherein at least one fluid line couples two of the plurality of valves spaced apart from the mounting block first surface; a heating element located within a first insulating layer and overlying the plurality of fluid lines and the mounting block, wherein the plurality of fluid lines are between the mounting block and the heating element, and a second insulating layer adjacent the first insulating layer and between the at least one fluid line and the mounting block first surface, wherein the plurality of fluid lines are between the first insulating layer and the second insulating layer, and wherein the first insulating layer extends over a portion and less than completely around the at least one fluid line. | ||
| 地址 | Phoenix AZ US | ||