Silicon layers formed from polymer-modified liquid silane formulations

摘要

The invention relates to a formulation which contains at least one silane and at least one carbon polymer in a solvent, and to the production of a silicon layer on a substrate which is coated with such a formulation.

主权项

1. A liquid silane formulation, comprising a reaction product of:
(A) a silane of either of formulas
SinR2n+2 orSinR2n, and (B) a high molecular weight carbon polymer miscible with (A), wherein a proportion of (B) is from 0.001 to 15% by weight, based on a mass of silicon in (A), wherein (B) is a copolymer, a linear polymer, or a combination thereof, wherein (B) comprises a main chain, comprising a —C—C-bond, a ring, a heteroatom, a heterocycle, or a combination thereof, wherein (B) comprises a subgroup selected from the group consisting of a saturated polymer, a polyacrylate, a methacrylate, a polyvinyl, a polyvinyl ketone, a polyvinyl ether, a polystyrene, or a combination thereof, and each R is independently H, halogen, or organyl.