Crystallization apparatus, crystallization method, organic light-emitting display apparatus and method of manufacturing organic light-emitting display apparatus

摘要

A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate, the crystallization apparatus including: a laser generator, which generates a laser beam, and a stage on which the substrate is mounted, where the semiconductor layer is divided into a plurality of crystallization areas and a plurality of non-crystallization areas, and the laser beam is radiated onto the crystallization areas a plurality of times to crystallize the crystallization areas, where the laser beam is radiated onto different positions of the same crystallization area a plurality of times.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
mounting a substrate on a stage, wherein a semiconductor layer that is divided into a plurality of crystallization areas and a plurality of non-crystallization areas is formed on a surface of the substrate; and radiating a laser beam onto the crystallization areas a plurality of times, wherein the radiating of the laser beam comprises sequentially radiating the laser beam onto the crystallization areas and then sequentially radiating the laser beam onto the crystallization areas by changing a position of the laser beam,
wherein the organic light-emitting display apparatus comprises a plurality of pixels having channel regions, storage regions, and emission regions, respectively, andthe performing of the crystallization comprises crystallizing only the channel regions and the storage regions.