| 发明名称 | Electric actuator | ||
| 摘要 | Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes. | ||
| 申请公布号 | US9096395(B2) | 申请公布日期 | 2015.08.04 |
| 申请号 | US201214122774 | 申请日期 | 2012.06.18 |
| 申请人 | TOKYO ELECTRON LIMITED | 发明人 | Wakabayashi Shinji |
| 分类号 | B65G45/10;B65G49/07;H01L21/677;B65G54/02 | 主分类号 | B65G45/10 |
| 代理机构 | Rothwell, Figg, Ernst & Manbeck, P.C. | 代理人 | Rothwell, Figg, Ernst & Manbeck, P.C. |
| 主权项 | 1. An electric actuator comprising: a body made of an elongated enclosure; a base portion configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the base portion; a seal member provided to cover the opening; and a pair of electrodes protruding from the body toward the outside of the body at opposite sides of the opening and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes, wherein positive potential is generated in one of the pair of electrodes and negative potential is generated in the other of the pair of electrodes. | ||
| 地址 | Tokyo JP | ||