Conductive film having oxide layer and method of manufacturing the same

摘要

Provided are a conductive film and a method of manufacturing the same. The conductive film includes a substrate, a first conductive layer formed on the substrate, and a patterned second conductive layer formed on the first conductive layer. Here, oxide layers are formed on top and side surfaces of the second conductive layer. The conductive film may prevent defects of the conductive layer caused by rapid oxidation or damage to the substrate, and increase emission uniformity.

主权项

1. A conductive film, comprising:
a substrate; a first conductive layer formed on the substrate; and a patterned second conductive layer (M1) formed on the first conductive layer, wherein oxide layers ((M2)xOy) are formed on top and side surfaces of the second conductive layer (M1), wherein M1 includes copper (Cu), aluminum (Al), molybdenum (Mb), chromium (Cr), magnesium (Mg), calcium (Ca), sodium (Na), potassium (K), titanium (Ti), indium (In), yttrium (Y), lithium (Li), gadolinium (Gd), silver (Ag), tin (Sn), lead (Pb) or an alloy containing two or more thereof, M1 and M2 are the same with each other, x is a number from 1 to 3, and y is a number from 1 to 4.