Susceptor support portion and epitaxial growth apparatus including susceptor support portion

摘要

A susceptor support portion of the present invention includes a susceptor shaft and a substrate lift portion. The susceptor shaft includes a support column and a plurality of arms that extend radially from the support column, the substrate lift portion includes a support column and a plurality of arms that extend radially from the support column, the arm of the susceptor shaft includes a first arm, a second arm coupled to the first arm, and a third arm coupled to the second arm, from the support column side of the susceptor shaft, the second arm being provided with a through hole which passes through the second arm in a vertical direction, and a width of the first arm of the susceptor shaft is smaller than a width of the second arm of the susceptor shaft.

主权项

1. A substrate support assembly comprising
a susceptor having one or more susceptor through holes formed therethrough; a susceptor shaft supporting the susceptor, wherein the susceptor shaft includes a susceptor shaft support column and a plurality of shaft arms that extend radially from the susceptor shaft support column, the plurality of shaft arms each having:
a shaft first arm coupled with the support column;a second shaft arm coupled with the first shaft arm, the second shaft arm having an arm through hole, a width of the first shaft arm being smaller than a width of the second shaft arm; anda third shaft arm coupled with the second shaft arm, the third shaft arm being in connection with the susceptor; a substrate lift portion comprising:
a lift portion support column; anda plurality of lift arms coupled with the lift portion support column, each of the lift arms comprising:
a first lift arm coupled with the lift portion support column;a second lift arm coupled to the first lift arm; anda pedestal portion coupled to the second lift arm; and a lift pin positioned in connection with each of the pedestal portions and oriented to pass through the arm through hole and the susceptor through hole.