Optical deflector including mirror with recessed rib on its rear surface

摘要

In an optical deflector including a mirror, a rib formed at an outer circumference of the mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror and coupled between the support frame and the mirror, and a pair of actuators arranged between the support frame and the torsion bar, a recess opposing the torsion bar is formed within the rib.

主权项

1. An optical deflector comprising:
a mirror; a first rib formed at an outer circumference of said mirror; a first support frame surrounding said mirror; at least one first torsion bar arranged along a first axis of said mirror and coupled between said first support frame and said mirror; a pair of first actuators arranged between said first support frame and said first torsion bar; and a first recess immediately adjacent to said first torsion bar, the first recess being formed within said first rib.