Cross-sectional dilation mode resonators

摘要

Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

主权项

1. A piezoelectric resonator structure, comprising:
a first conductive layer including at least one electrode; a second conductive layer including at least one electrode; a piezoelectric layer between the first conductive layer and the second conductive layer to define a resonator, each section of the resonator capable of vibrating with displacement along an X axis, a Y axis and a Z axis responsive to at least one signal provided to the at least one electrode of the first conductive layer or the at least one electrode of the second conductive layer, the piezoelectric layer being a rectangular solid having a width (W) along the X axis, a length (L) along the Y axis, and a thickness (T) along the Z axis, each of the X axis, the Y axis and the Z axis being perpendicular to one another; the displacement of each section of the resonator along each of the X axis and the Z axis being dependent on a numerical ratio of the thickness and the width, T/W; the displacement of each section of the resonator along each of the Y axis and the Z axis being dependent on a numerical ratio of the thickness and the length, T/L; and a substrate including a cavity therein or thereon, the resonator being adjacent the cavity.