Variable capacitor tuned using laser micromachining

摘要

A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.

主权项

1. A variable capacitor fabricated on a substrate, the capacitor comprising:
a first plate fabricated on the substrate, a dielectric fabricated on the first plate, a second plate fabricated on the dielectric so that the dielectric is located between the first and second plates, the second plate including a plurality of subparts, each of the plurality of subparts including a first end and a second end and being connected to each subpart adjacent to the subpart at the first and second ends by a corresponding pair of first and second trimmable connections located, respectively, at the first and second ends of the subpart, such that the plurality of subparts are connected together by a plurality of corresponding pairs of first and second trimmable connections forming electrical connections between the plurality of subparts, each of the plurality of subparts having corresponding predefined dimensions so as to provide a tuning range for the capacitor's capacitance value, the capacitor's capacitance value being tuned to a predetermined value by at least one of the corresponding pairs of first and second trimmable electrical connections being trimmed from the capacitor, so as to trim at least one subpart from the capacitor by electrically separating the at least one subpart from the other subparts included in the second plate.