| 发明名称 | Workpiece flipping mechanism for space-constrained environment | ||
| 摘要 | In one embodiment, a flipping module operable to flip a workpiece delivered by a robot in a vacuum transfer chamber (VTC) includes a gripper disposed outside a working envelope of the robot in a parked position in a vacuum environment of the VTC, and an actuator operable to move the gripper from the parked position to a receiving position, and to rotate the gripper and workpiece to thereby flip the workpiece. | ||
| 申请公布号 | US9099510(B2) | 申请公布日期 | 2015.08.04 |
| 申请号 | US201313844420 | 申请日期 | 2013.03.15 |
| 申请人 | Genmark Automation, Inc. | 发明人 | Todorov Alexander;Sotirov Zlatko Manolov |
| 分类号 | H01L21/677;H01L21/687 | 主分类号 | H01L21/677 |
| 代理机构 | Nixon Peabody LLP | 代理人 | Nixon Peabody LLP |
| 主权项 | 1. A flipping module operable to flip a workpiece delivered by a robot in a vacuum transfer chamber (VTC), the flipping module comprising: a gripper disposed outside a working envelope of the robot when the gripper is in a parked position in a vacuum environment of the VTC; wherein the gripper and robot are located in said VTC; an actuator operable to move the gripper from the parked position to a receiving position, and to rotate the gripper and workpiece to thereby flip the workpiece; wherein the actuator is configured for placement outside the vacuum environment of the VTC. | ||
| 地址 | Milpitas CA US | ||