IMAGE QUALITY EVALUATION METHOD, AND IMAGE QUALITY EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an image quality evaluation method and an image quality evaluation device capable of calculating an index value for properly evaluating expression of an image of a charged particle beam device.SOLUTION: Provided is a method and device in which an image quality evaluation device comprises an arithmetic device executing image quality evaluation of an image obtained by a charged particle beam device on the basis of image processing of the image. The arithmetic device calculates an SN ratio and an image sharpness of the image, and calculates an entropy of the image on the basis of the SN ratio and the image sharpness of the image.