VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus that is excellent in control accuracy of vapor deposition rate on a substrate in the whole vapor deposition region, and to provide a vapor deposition method and a method for manufacturing an organic electroluminescence element.SOLUTION: The vapor deposition apparatus for depositing a film on a substrate includes: a first film thickness monitor; and a vapor deposition unit including a vapor deposition source. The vapor deposition apparatus performs vapor deposition while controlling a distance between a part where an evaporated material is discharged from the vapor deposition source and a surface of the substrate to be evaporated on the basis of the measurement result of the first film thickness monitor.