| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a division method of a ceramics substrate capable of enhancing the yield without changing the groove depth of a split groove.SOLUTION: A ceramics substrate 1 conveyed by a conveyor belt 2 is held between a reception roller 3 consisting of a rubber roller, and a split roller 4 consisting of a metal roller. Under this state, pressing forces of different magnitude are given from a pressure device to the opposite ends of the split roller 4 in the axial direction. Consequently, crack occurs from the end of a split groove 1a on the side receiving a large pressing force from the split roller 4, and the final fracture surface is located reliably near the end on the opposite side receiving a small pressing force.</p> |
