ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MANUFACTURING METHOD FOR SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor which can shorten a startup time.SOLUTION: A plurality of driving arms 11A, 11B, 11C, 11D are 4 in number and arranged line-symmetrically with respect to a center line extending in a y-axis direction. A plurality of detection arms 13A, 13B are 2 in number and arranged line-symmetrically with respect to the center line. An excitation circuit excites the driving arms 11 in the same phase to each other so that a first driving arm 11A and a second driving arm 11B on one side of line symmetry are deformed together to the same side to each other in the excitation direction, excites the driving arms on the same phase to each other so that a third driving arm 11C and a fourth driving arm 11D on the other side of line symmetry are deformed together to the same side to each other, and excites the arms in the opposite phase to each other in the excitation direction so that the first driving arm 11A and the second driving arm 11B on one side of the line symmetry and the third driving arm 11C and the fourth driving arm 11D on the other side of the line symmetry are deformed on the mutually opposite side in the excitation direction.