| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a break apparatus capable of breaking an upper first substrate and a lower second substrate along scribe lines formed thereon without turning over a mother substrate.SOLUTION: A break apparatus comprises a conveyor 2 including a conveyance belt 1 for conveying a stuck substrate M placed thereon, a press member 4 which is disposed over the conveyance belt 1 and can move up and down, a first receiving member 12 which comes into contact with the reverse side of the conveyance belt 1, and a press member 8 which is disposed over the conveyance belt 1 upstream from the press member 4 in a substrate conveying direction and can move up and down. The conveyance belt 1 is formed of an elastic raw material which flexes with pressing force of the press member 4, and the first receiving member 12 has an edge 12a on a substrate conveying-direction downstream side formed extending in a direction orthogonal to the substrate conveying direction.</p> |
