| 摘要 |
PROBLEM TO BE SOLVED: To facilitate obtaining a heat insulation layer structure low in the surface roughness of a heat insulation layer and high in heat insulation performance, and facilitate controlling the thickness of the heat insulation layer in such a heat insulation layer structure.SOLUTION: A method of manufacturing a heat insulation layer structure comprises the steps of: producing a thin film 40 formed of a material lower in thermal conductivity than a base material; forming a plurality of concave portions 41 in predetermined positions of a surface of the thin film 40; building up a plurality of thin films 40 and forming a multilayer body; disposing the multilayer body on the base material; and firing the multilayer body disposed on the base material. In the step of forming the multilayer body, the thin films 40 are built up so that the concave portions 41 of the thin films 40 directly contact each other do not overlap in a perpendicular direction of the surfaces of the thin films 40. |
