| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas sensor which has high sensitivity and accuracy and which is easily reduced in size, and a method for manufacturing the same.SOLUTION: A gas sensor 60 includes: a substrate 30; a lower electrode 40b which is formed on the substrate 30 and whose surface has protrusions 54; upper electrodes 52 installed above the lower electrode 40b; and sensitive films 55 which are provided on the surface of the lower electrode 40b and which absorb gas contained in air. A space in which the air circulates is provided between the upper electrodes 52 and the lower electrode 40b.</p> |
