VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOBILE BODY, AND MANUFACTURING METHOD OF VIBRATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a vibration element having a high Q value by reducing generation of an unnecessary vibration such as a torsional vibration; an electronic device, an electronic apparatus, and a mobile body including the vibration element; and a manufacturing method of the vibration element. ! SOLUTION: A vibration element 1 includes: a base part 10; a vibration arm 12 extending from the base part 10; and a groove 24 in which a bottomed groove is provided from a first principal plane 20 of the vibration arm 12 toward a second principal plane 22 on an opposite side of the first principal plane 20. In a sectional view that crosses an extension direction of the vibration arm, a width of the second principal plane 22 is narrower than a width of the first principal plane 20. ! COPYRIGHT: (C)2015,JPO&INPIT