发明名称 SUPPORT MECHANISM AND SUBSTRATE PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a support mechanism achieving both elastic contact for the manifold of a lid and airtight retention. ! SOLUTION: A support mechanism for supporting a lid that seals the throat of a heat-treating furnace by the lift using lifting means or releases sealing includes a first elastic body having a first elastic modulus, and a second elastic body having a second elastic modulus larger than the first elastic modulus. When the lid lifted by the lifting means comes into contact with the throat, a reaction related to the first elastic body is applied to the lid, and after the lid lifted by the lifting means comes into contact with the throat, a reaction related to the first elastic body and second elastic body is applied to the lid. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015141994(A) 申请公布日期 2015.08.03
申请号 JP20140013738 申请日期 2014.01.28
申请人 TOKYO ELECTRON LTD 发明人 KIKUCHI HIROSHI ; KOBAYASHI YOSHIYUKI
分类号 H01L21/677;H01L21/205;H01L21/22;H01L21/324 主分类号 H01L21/677
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