| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas container filled with a fluorine hydrocarbon compound, suppressing the generation amount of a dehydrofluorination compound. ! SOLUTION: When a gas container subjected inner surface polishing with a polishing stone not containing alumina is filled with a C4 or C5 linear saturated fluorine hydrocarbon compound, generation of dehydrofluorination compound caused by decomposition reaction is suppressed, and the gas container can be filled with the fluorine hydrocarbon compound while high purity is maintained. ! COPYRIGHT: (C)2015,JPO&INPIT |
