| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode built-in plate which can suction a suctioned object to hold the object while withstanding application of high voltage and a process environment and makes contamination less likely to be caused by a corrosive gas or under a plasma environment, and to provide an electrostatic chuck formed by the electrode built-in plate. ! SOLUTION: An electrode built-in plate includes: a base substance 1 made of ceramic, is formed into an integral form, and includes an electrode region 1s and an opening part 3 connected with the electrode region 1s and the exterior; and an electrode 2. The electrode 2 is made of silver or copper, is positioned in the electrode region 1s, and has a thickness of 50 μm or thicker. ! COPYRIGHT: (C)2015,JPO&INPIT |
