| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attraction carrier with improved handing performance of substrate and an exposure method of resist using the same.SOLUTION: The electrostatic attraction carrier for holding a substrate by means of electrostatic attraction includes: a base member formed of a transparent dielectric material; and a pair of electrodes formed of a conductive material, which are disposed being separated from each other in the base material. Each of the electrodes has a window formed as an opening; or in an area between the electrodes, a window is formed, which is larger than one circuit pattern area in a repeated circuit patterns which are formed on the surface of the substrate. |
